sah -- he; tat -- his (Lord Siva's); vara -- the benediction; pariksha-artham -- in order to test; sambhoh -- of Lord Siva; murdhni -- on the head; kila -- indeed; asurah -- the demon; sva -- his own; hastam -- hand; dhatum -- to put; arebhe -- he tried; sah -- he; abibhyat -- became afraid; sva -- by himself; kritat -- because of what had been done; sivah -- Lord Siva.

To test Lord Sambhu's benediction, the demon then tried to put his hand on the Lord's head. Thus Siva was frightened because of what he himself had done.