saḥ - he; tat - his (Lord Śiva's); vara - the benediction; parīkṣā-artham - in order to test; śambhoḥ - of Lord Śiva; mūrdhni - on the head; kila - indeed; asuraḥ - the demon; sva - his own; hastam - hand; dhātum - to put; ārebhe - he tried; saḥ - he; abibhyat - became afraid; sva - by himself; kṛtāt - because of what had been done; śivaḥ - Lord Śiva.

To test Lord Śambhu’s benediction, the demon then tried to put his hand on the Lord’s head. Thus Śiva was frightened because of what he himself had done.